S. P. Murarka
Books
- Microelectronics technology and process integration
- Advanced interconnects and contact materials and processes for future integrated circuits
- Low-dielectric constant materials-- synthesis and applications in microelectronics
- Interlayer dielectrics for semiconductor technologies
- Silicides for VLSI applications
- Interface Control of Electrical, Chemical, and Mechanical Properties Vol. 318
- Electronic materials
- Advanced metallizations in microelectronics
- Metallization
Author data: Open Library