Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
by Christopher L. Borst, Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann
PolishingSemiconductorsGrinding and polishingInterconnects (Integrated circuit technology)Plastics & polymers technologyScience/MathematicsIntegrated CircuitsTechnology
Writing a summary for young readers…
For young readers
Book data: Open Library