
Microelectromechanical systems
by National Research Council Staff, Engineering and Technical Systems Commission, Division on Engineering and Physical Sciences Staff, National Materials Advisory Board
Microelectromechanical systemsMaterialsMicroelectronicsDesign and constructionMicromechanicsMicroélectroniqueMatériauxMicrosystèmes électromécaniques
Writing a summary for young readers…
For young readers
Book data: Open Library