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Cover of Micro mechanical systems

Micro mechanical systems

by T. Fukuda, W. Menz

Microelectromechanical systems -- Handbooks, manuals, etcMicroelectromechanical systemsHandbooks, manualsElectromechanical devicesMicroelectronicsMicrosystèmes électromécaniquesGuides, manuelsTECHNOLOGY & ENGINEERING
Writing a summary for young readers…

For young readers

Book data: Open Library