Reliability of MEMS
by Gary K. Fedder, Jan G. Korvink, Osamu Tabata
Microelectromechanical systemsReliabilityElectromechanical devicesMarket surveys
Writing a summary for young readers…
For young readers
Book data: Open Library
by Gary K. Fedder, Jan G. Korvink, Osamu Tabata
Book data: Open Library