Measurement Technology for Micro-Nanometer Devices
by Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue
Physical measurementsMeasurementNanotechnologyTestingMicrotechnologyMicroelectromechanical devicesMicroscopy, techniqueMicroelectromechanical systems
Writing a summary for young readers…
For young readers
Book data: Open Library