Device and Process Technologies for Mems ,Microelectronics, and Photonics
by Jung-Chih Chiao, Alex Hariz, Jamieson, David, Vijay Varadan
PhotonicsPhotomechanical processesPhotolithographyMicroelectromechanical systemsCongressesPhoton detectorsDesign and construction
Writing a summary for young readers…
For young readers
Book data: Open Library