Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
by Mary Maher, Thomas Ann Suleski, Eric Johnson undifferentiated, Harold Stewart, Jung-Chih Chiao
MachiningIntegrated opticsMiniature electronic equipmentOptoelectronic devicesMicroelectromechanical systemsMicromachiningCongressesDesign and construction
Writing a summary for young readers…
For young readers
Book data: Open Library