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Artificial Graphene in Nano-patterned GaAs Quantum Wells and Graphene Growth by Molecular Beam Epitaxy

by Sheng Wang

In this dissertation I present advances in the studies of artificial lattices with honeycomb topology, called artificial graphene (AG), in nano-patterned GaAs quantum wells (QWs). AG lattices with very small lattice constants as low as 40 nm are achieved for the first time in GaAs. The high quality AG lattices are created by optimized electron-beam (E-beam) lithography followed by inductively coupled plasma reactive-ion etching (ICP-RIE) process. E-beam lithography is used to define a honeycomb lattice etch mask on the surface of the GaAs QW sample and the optimized anisotropic ICP-RIE process is developed to transfer the pattern into the sample and create the AG lattices. Such high-resolution AG lattices with small lattice constants are essential to form AG miniband structures and create well-developed Dirac cones. Characterization of electron states in the nanofabricated artificial lattices is by optical experiments. Optical emission (photoluminescence) yields a determination of the Fermi energy of the electrons. A significant reduction of the Fermi energy is due to the nano-patterning process. Resonant inelastic light scattering (RILS) spectra reveal novel transitions related to

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Book data: Open Library