Advanced interconnects for ULSI technology
by Mikhail Baklanov, P. S. Ho, Ehrenfried Zschech
TECHNOLOGY & ENGINEERING / Electronics / Circuits / VLSI & ULSIIntegrated circuitsUltra large scale integrationInterconnects (Integrated circuit technology)Integrated circuits, ultra large scale integration
"This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"--
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Book data: Open Library